Measurement & Testing
| Sat 13 Jun 2026
Beijing, June 13 -- Canon has filed a patent application for Exposure Apparatus, Measurement Method, and Article Manufacturing Method. This invention was developed by Suzuki Tasuku, Tajitsu Shinya, Inamura Hisashi, Kimura Hitoshi, Suzuki Toru and Hemmi Kazuhiro.
The patent application number is CN202511148783 20250818. The pate..