Semiconductor
| Tue 03 Nov 2026
Alexandria, Nov. 2 -- Ebara has submitted a patent application for Substrate Processing Apparatus. Saito Hiroki, Inoue Takuya, Miyazaki Mitsuru, Takahashi Shozo, Takebuchi Kenichi, Miyagawa Saki, Sotozaki Hiroshi, Miyamoto Hiroki and Ishii Ryohei developed the invention.
The patent application number is US202619731994 20260706...