Seoul, April 30 -- Lam Research has submitted a patent application for transformer coupled plasma source design for thin dielectric film deposition. This invention was developed by Guo Tongtong, Batzer Rachel E, Chen Lee, Juarez Francisco J, Mckerrow Andrew John, Gong Bo, Khojasteh Malak, Gui Zhe and Qiu Huatan. The patent appl..

Taipei, April 29 -- Taiwan Patent Office has awarded a patent to Lam Research for method, controller, and system for controlling a plasma process using multiple variables. Valcore Jr John C, Hudson Eric Allen and Bise Ryan developed the invention. The patent application number is TW20220141739 20171204. The patent publication n..

Seoul, April 29 -- Lam Research has sought patent for foreline assembly for quad station process module. This invention was developed by Vasquez Miguel Benjamin and Draper Emile. The patent application number is KR20247008040 20200414. The patent publication number is KR20240038810 (A). International Patent Classification code ..

Seoul, April 29 -- Lam Research has submitted a patent application for plasma etching chemistries of high aspect ratio features in dielectrics. This invention was developed by Kanarik Keren J, Tan Samantha Siam Hwa, Pan Yang and Marks Jeffrey. The patent application number is KR20247008302 20190312. The patent publication numbe..

Seoul, April 29 -- Lam Research has filed a patent application for plasma etching chemistries of high aspect ratio features in dielectrics. This invention was developed by Kanarik Keren J, Tan Samantha Siam Hwa, Pan Yang and Marks Jeffrey. The patent application number is KR20247008299 20190312. The patent publication number is..

Seoul, April 29 -- Lam Research has submitted a patent application for plasma etching chemistries of high aspect ratio features in dielectrics. This invention was developed by Kanarik Keren J, Tan Samantha Siam Hwa, Pan Yang and Marks Jeffrey. The patent application number is KR20247008294 20190312. The patent publication numbe..

Taipei, April 29 -- Lam Research has been awarded a patent for user interface and processor for edge ring wear compensation. This invention was developed by Kamp Tom A and Leal-verdugo Carlos. The patent application number is TW20230124253 20181204. The patent publication number is TWI863390 (B). International Patent Classifica..

Taipei, April 29 -- Taiwan Patent Office has awarded a patent to Lam Research for multi-station semiconductor processing with independently adjustable pedestals. Pasquale Frank Loren, Petraglia Jennifer Leigh, Baskar Dinesh and Lavoie Adrien developed the invention. The patent application number is TW20200107774 20200310. The p..

Seoul, April 29 -- Lam Research has submitted a patent application for systems and methods for providing characteristics of an impedance matching model for use with matching networks. This invention was developed by Howald Arthur M, Lyndaker Bradford J, Valcore Jr John C and Jafarian Tehrani Seyed Jafar. The patent application ..

Taipei, April 24 -- Lam Research has been awarded a patent for detection system for tunable/replaceable edge coupling ring. This invention was developed by Mcchesney Jon, Wang Yuhou, Genetti Damon Tyrone and Paterson Alexander. The patent application number is TW20220144724 20180528. The patent publication number is TWI860581 (..

Taipei, April 24 -- Lam Research has secured a patent on modular-component system for gas delivery. Stumpf John Folden, Long Damien, Nakashima Norman and Leeser Karl Frederick developed the invention. The patent application number is TW20200112670 20200415. The patent publication number is TWI860346 (B). International Patent Cl..

Taipei, April 24 -- Lam Research has secured a patent on split chamber assembly. Antolik Jerrel Kent developed the invention. The patent application number is TW20190148355 20191230. The patent publication number is TWI860318 (B). International Patent Classification codes are H01J37/32 and H01L21/67. Cooperative Patent Classifi..

Taipei, April 24 -- Lam Research has received a patent for substrate processing system and method therefor. This invention was developed by Han Hui Ling and Ramachandran Seetharaman. The patent application number is TW20200109974 20200325. The patent publication number is TWI861079 (B). International Patent Classification codes..

Taipei, April 24 -- Lam Research has been granted a patent for electrostatic chuck with ceramic monolithic body. Wang Feng, Gaff Keith, Kimball Christopher and Ehrlich Darrell developed the invention. The patent application number is TW20200104140 20200211. The patent publication number is TWI861055 (B). International Patent Cl..

Taipei, April 24 -- Taiwan Patent for substrate processing systems has been issued to Lam Research. This invention was developed by Long Maolin, Rastgar Neema and Paterson Alexander Miller. The patent application number is TW20190148308 20191230. The patent publication number is TWI861041 (B). International Patent Classificatio..

Taipei, April 24 -- Lam Research has obtained a patent for identification of and compensation for a failure in a heater array. This invention was developed by Jing Changyou. The patent application number is TW20190138753 20191028. The patent publication number is TWI861022 (B). International Patent Classification codes are H01J..

Seoul, April 24 -- Korean Intellectual Property Office has published Lam Research patent application for substrate supports with mesochannel assemblies. The invention was developed by Subramanya Spoorthi, Revanna Shivakumara, Flynn Kevin, Gandur Balagangadhara Chandrashekara Kaushik, Jain Muskaan and Krishna Murthy Santosh Kumar..

Taipei, April 24 -- Taiwan Patent Office has awarded a patent to Lam Research for combiner and distributor for adjusting impedances or power across multiple plasma processing stations. Kapoor Sunil, Thomas George, Rangineni Yaswanth and Augustyniak Edward developed the invention. The patent application number is TW20230144890 2..