Semiconductor
| Tue 31 Mar 2026
Beijing, March 31 -- SCREEN Holdings has applied Chinese patent for Substrate Processing Apparatus. Wang Zhida, Akanishi Yuya, Muramoto Shuji, Kasamatsu Hiroo, Uehara Daiki, Motono Tomohiro, Otawa Koji, Alonso Rodriguez Samuel, Fujiwara Tomohiro and Takatsu Kenta developed it.
The patent application number is CN202510593103 202..