Semiconductor
| Mon 08 Dec 2025
Alexandria, Dec. 9 -- U.S. Patent and Trademark Office has published Ebara patent application for Transfer Apparatus, Cleaning Module, and Substrate Processing Apparatus. The invention was developed by Matsugu Asagi, Yazawa Akihiro, Furusawa Manato, Aoyama Hideharu, Saito Ayumu, Sasaya Yusuke, Kobayashi Kenichi, Miyasawa Yasuyuk..