Semiconductor
| Tue 01 Sep 2026
Seoul, Sept. 2 -- Samsung Electronics has applied Korean patent for Edge Ring and Apparatus for Processing a Substrate Including the Same. Kang Song Yun, Soh Jae Hyun, Lee Deuk Ho, Kim Han Sol, Chu Yang Yeon, Choi Minn Hoo, Kwon Wook Hyeon, Cho Jung Hyun, Uzun Kaan, Park Chul Woo, Shin Dong Kyu, Kim Yong Woo, Kim Jae Hyun and Le..