Semiconductor
| Fri 17 Apr 2026
Beijing, April 18 -- Zhangjiang Nat Laboratory has sought patent for Laser Amplifier Assembly, Laser System and Lithographic Apparatus. This invention was developed by Zhang Peng, Cai Yiming, Ma Zhaowang, Zhou Yicheng, Guo Junping, Wu Yitong, Lu Zhan and Ding Xing.
The patent application number is CN202410706815 20240531. The..