Semiconductor
| Sat 01 Aug 2026
Alexandria, Aug. 1 -- Semes Co Ltd and Samsung Electronics have obtained a patent for apparatus and method for processing substrate. This invention was developed by Kim Min Jung, Kim Hee Hwan, Kim Kyoung Suk, Park Jin Hyung, Han Jin Ah, Park Jong Hyeok, Cha Ji Hoon, Hong Yong Hoon and Chung Dae Hyuk.
The patent application nu..