Semiconductor
| Fri 28 Aug 2026
Munich, Aug. 29 -- SCREEN Holdings has submitted a patent application for Substrate Processing Device, Substrate Processing Method, and Substrate Processing Program. This invention was developed by Yamanouchi Yuta, Kikuchi Shunki, Ikegami Yutaka, Aoki Rikuta, Endo Toru, Kato Takuji and Odani Kaito.
The patent application number..