Semiconductor
| Tue 06 Oct 2026
Alexandria, Oct. 5 -- Tokyo Electron has received a patent for Advanced OES Characterization. This invention was developed by Mihaylov Mihail, Song Da, Zhu Ying, Voronin Sergey, Messer Blaze, Chen Yan, Shalini Ashawaraya, Ko Akiteru, Ng Joel and Machuca Francisco.
The patent application number is US202318298259 20230410. The ..